Scatterometer and a method for observing a surface

Scatterometer including an internal calibration system

Scatterometry based measurements of a rotating substrate

Scatterometry for junction metrology

Self-calibration of an optical-based sensor using a total...

Sensing apparatus

Sensing element used in sensing device for sensing target...

Sensing element used in sensing device for sensing target...

Sensing system

Sensor and method of detecting the condition of a turf grass

Sensor and method of detecting the condition of a turf grass

Sensor and sensing utilizing a laser

Sensor arrangement for detecting the degree of wetting of a wind

Sensor detecting attenuated total reflection angle by using...

Sensor device

Sensor device and method of operation

Sensor device and testing method utilizing localized plasmon...

Sensor device for detecting a degree of wetting and/or...

Sensor device for determining the degree of wetting and/or soili

Sensor device for interference and...