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In-situ absolute measurement process and apparatus for film...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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In-situ automated contactless thickness measurement for...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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In-situ method and apparatus for end point detection in...

Optics: measuring and testing – Dimension – Thickness
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In-situ method and apparatus for end point detection in...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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In-situ thickness and refractive index monitoring and...

Optics: measuring and testing – Dimension – Thickness
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