4. Optics: measuring and testing
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Method and apparatus for detecting defects in the...

Optics: measuring and testing – By configuration comparison – With projection on viewing screen
Reexamination Certificate

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Method and apparatus for inspecting target defects on a wafer

Optics: measuring and testing – By configuration comparison – With projection on viewing screen
Reexamination Certificate

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Method of and apparatus for inspecting the accuracy of a machine

Optics: measuring and testing – By configuration comparison – With projection on viewing screen
Patent

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Molecularity measurement instrument and molecularity...

Optics: measuring and testing – By configuration comparison – With projection on viewing screen
Reexamination Certificate

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