Catadioptric projection system, and exposure apparatus...

Details Catadioptric projection system, and exposure apparatus... Catadioptric projection system, and exposure apparatus...

2007-09-11

2007-09-11

Schwartz, Jordan (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S650000

Reexamination Certificate

active

11271665

ABSTRACT:
A catadioptric projection system for forming an intermediate image of a first object plural times, and images the intermediate image onto a second object includes at least two deflective reflectors, a lens unit arranged in an optical path between the two deflective reflectors, the lens unit having a negative refractive power, and not forming a reciprocating optical system that passes incident light and reflected light.

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