Optical: systems and elements – Diffraction – From zone plate
Patent
1991-06-18
1994-01-04
Arnold, Bruce Y.
Optical: systems and elements
Diffraction
From zone plate
359571, 359580, 430 5, G02B 2744, G02B 518, G02B 110
Patent
active
052765512
ABSTRACT:
A reticle and a method of fabricating the samer for projecting a fine pattern on an object surface comprises: a. transparent substrate; a first type phase-shifter selectively patterned and deposited on the substrate producing a phase difference between the light passing therethrough and the light passing through the other areas without phase-shifter; and a second type phase-shifter selectively patterned and forming a groove in the substrate producing a phase difference between the light passing therethrough and the light passing through the other areas without phase-shifter. The reticle may include a patterned shield layer which interrupts transmission of light, and the phase difference of the first and second type phase-shifters is many times selected substantially equal to a half wavelength of light. Another type of a reticle comprises: a transparent substrate; a phase-shifter of a first groove; and another phase-shifter of a second deeper groove formed in the first groove.
REFERENCES:
patent: 3547546 (1970-12-01), Schier
patent: 4530736 (1985-07-01), Mutter
patent: 4737447 (1988-04-01), Suzuki et al.
Arnold Bruce Y.
Collins Darryl
Fujitsu Limited
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