Reflective lithography mask inspection tool based on...

Details Reflective lithography mask inspection tool based on... Reflective lithography mask inspection tool based on...

2005-07-05

2005-07-05

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Diffraction

From zone plate

C359S569000, C359S576000, C359S350000, C359S355000, C359S361000

Reexamination Certificate

active

06914723

ABSTRACT:
A mask blank inspection tool includes an AFO having a diffractive lens and a refractive lens formed on a common substrate. The diffractive lens is a Fresnel zone plate and the refractive lens is a refractive Fresnel lens. The AFO is used to image light from a defect particle on a multilayer mask blank or the surface of the multilayer mask blank to a detector.

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