Polarization independent grating
Polarization independent grating modulator
Polarization insensitive beam splitting grating and...
Polarization phase difference plate
Polarization-selectively blazed, diffractive optical element
Polarized diffractive filter and layered polarized...
Prism diffuser for diffracting and spreading light
Projection aligner, aberration estimating mask pattern,...
Projection aligner, aberration estimating mask pattern,...
Projection exposure apparatus
Projection exposure apparatus and device manufacturing method
Projection optical system and projection exposure apparatus usin
Pseudo-spherical stepped diffractor constructed under...
Quasi volume diffracting structures
Reconfigurable compound diffraction grating
Reconfigurable zone plate lens
Reconfigurable zone plate lens
Reduced loss diffractive structure
Reflecting diffraction grating and device, such as encoder or th
Reflection type diffraction grating