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Polarization-selectively blazed, diffractive optical element

Optical: systems and elements – Diffraction – From grating
Reexamination Certificate

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Polarized diffractive filter and layered polarized...

Optical: systems and elements – Diffraction – From grating
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Prism diffuser for diffracting and spreading light

Optical: systems and elements – Diffraction – From grating
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Projection aligner, aberration estimating mask pattern,...

Optical: systems and elements – Diffraction – From grating
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Projection aligner, aberration estimating mask pattern,...

Optical: systems and elements – Diffraction – From grating
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Projection exposure apparatus

Optical: systems and elements – Diffraction – From grating
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Projection exposure apparatus and device manufacturing method

Optical: systems and elements – Diffraction – From grating
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Projection optical system and projection exposure apparatus usin

Optical: systems and elements – Diffraction – From grating
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Pseudo-spherical stepped diffractor constructed under...

Optical: systems and elements – Diffraction – From grating
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