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Projection optical system, exposure apparatus and device...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Projection system comprising a free form reflector and a free fo

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Projection system for a lithographic apparatus

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Re-imaging optical system including refractive and diffractive o

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Reduction objective for extreme ultraviolet lithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflecting optical imaging apparatus using spherical reflectors

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Reflecting optical system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflecting telescope including a flat apertured mirror rotatable

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Reflective fly's eye condenser for EUV lithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Reflective optical system for a microscopic spectrometer

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Reflective projection lens for EUV-photolithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Reflective projection lens for EUV-photolithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Reflective projection lens for EUV-photolithography

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Reflective-type projection optical system and exposure...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Reflector telescope

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Sample observation method, microscope, and solid immersion...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Sample observation method, microscope, and solid immersion...

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Schiefspiegler telescope with three reflecting surfaces

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Second generation FLIR NV-81

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Patent

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Small-sized variable magnification optical system

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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