Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate
2005-11-04
2008-10-14
Nguyen, Thong (Department: 2872)
Optical: systems and elements
Compound lens system
With curved reflective imaging element
C359S858000, C355S067000
Reexamination Certificate
active
07436589
ABSTRACT:
A reflective-type projection optical system has 8 reflective mirrors that form a reduced image of a first surface on a second surface. A first reflective imaging optical system (G1) forms an intermediate image of the first surface, and a second reflective imaging optical system (G2) forms an image of the intermediate image on the second surface. The first reflective imaging optical system has, from the first surface side in order of light beam incidence, a first reflective mirror (M1), a second reflective mirror (M2), a third reflective mirror (M3), and a fourth reflective mirror (M4). The second reflective imaging optical system has, from the first surface side in order of light beam incidence, a fifth reflective mirror (M5), a sixth reflective mirror (M6), a seventh reflective mirror (M7), and an eighth reflective mirror (M8). At least one of the reflective surfaces of these 8 reflective mirrors is composed of a spherical surface.
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English translation of the Japanese reference No. 2002-116382.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Nguyen Thong
Nikon Corporation
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