Package for MEMS devices

Details Package for MEMS devices Package for MEMS devices

2008-05-13

2008-05-13

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

C438S106000, C257SE25010

Reexamination Certificate

active

07370530

ABSTRACT:
A package for packaging one or more MEMS devices is disclosed. A package in accordance with an illustrative embodiment of the present invention can include a packaging structure having a base section, a top section, and an interior cavity adapted to contain a number of MEMS devices therein. In some embodiments, the packaging structure can include a first side, a second side, a third side, and a top end, which, in certain embodiments, may form a pinout plane surface that can be used to connect the packaging structure to other external components. In some embodiments, a number of MEMS-type inertial sensors contained within the interior cavity of the packaging structure can be used to detect and measure motion in multiple dimensions, if desired.

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