Parametric amplification of a MEMS gyroscope by capacitance...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Reexamination Certificate

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08037757

ABSTRACT:
Parametric amplification of the output of a MEMS gyroscope is achieved by modulating the sense capacitance, or an auxiliary capacitance having an applied DC voltage. The capacitance modulation is produced by the driven motion of the gyroscope mechanism, so the pump signal of the parametric amplifier is not subject to phase errors in the electronics. The capacitance modulation affects the mechanical gain of the sensor (transfer function from input force to sensor mechanism displacement), as well as the electrical gain of the sensor (transfer function from sensor mechanism displacement to output electrical signal). The mechanical and electrical gains of the sensor become phase-dependent, so the Coriolis rate signal can be amplified while the unwanted quadrature-phase signal is attenuated.

REFERENCES:
patent: 6257059 (2001-07-01), Weinberg et al.
patent: 6611168 (2003-08-01), Denison et al.
patent: 6715353 (2004-04-01), Johnson
patent: 7036373 (2006-05-01), Johnson et al.
Scott G. Adams et al., “Independent Tuning of Linear and Nonlinear Stiffness Coefficients,” Journal of Microelectromechanical Systems, vol. 7, No. 2, Jun. 1998.
Oropeza-Ramos et al., Parametric Resonance Amplification in a MEMGyroscope, 2005, pp. 660-663.
Oropeza-Ramos et al., Inherently Robust Micro Gyroscope Actuated by Parametric Resonance, MEMS 2008, Tucson, AZ, Jan. 13-17, 2008, pp. 872-875.

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