Micromechanical rate of rotation sensor (DRS)
Micromechanical rate of rotation sensor having ring with drive e
Micromechanical resonator device
Micromechanical resonator of a vibration gyrometer
Micromechanical rotation rate sensor
Micromechanical rotation rate sensor and method for...
Micromechanical rotation speed sensor
Micromechanical rotational rate sensor
Micromechanical rpm sensor
Micromechanical sensor
Micromechanical sensor and method for the manufacture thereof
Micromechanical sensor including a single-crystal silicon suppor
Micromechanical sensor unit for detecting acceleration
Micromechanical sensor with a guard band electrode
Micromechanical sensor with a guard band electrode and fabricati
Micromechanical speed sensor
Micromechanical spin angular acceleration sensor
Micromechanical spring structure, in particular, for a...
Micromechanical structure
Micromechanical structure, in particular for an acceleration...