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Micromechanical rate of rotation sensor (DRS)

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical rate of rotation sensor having ring with drive e

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromechanical resonator device

Measuring and testing – Speed – velocity – or acceleration – Temperature compensator
Reexamination Certificate

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Micromechanical resonator of a vibration gyrometer

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromechanical rotation rate sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical rotation rate sensor and method for...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical rotation speed sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Micromechanical rotational rate sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical rpm sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromechanical sensor and method for the manufacture thereof

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromechanical sensor including a single-crystal silicon suppor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromechanical sensor unit for detecting acceleration

Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means
Patent

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Micromechanical sensor with a guard band electrode

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromechanical sensor with a guard band electrode and fabricati

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Micromechanical speed sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical spin angular acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromechanical spring structure, in particular, for a...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micromechanical structure

Measuring and testing – Speed – velocity – or acceleration
Reexamination Certificate

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Micromechanical structure, in particular for an acceleration...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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