Micromechanical sensor unit for detecting acceleration

Details Micromechanical sensor unit for detecting acceleration Micromechanical sensor unit for detecting acceleration

1996-09-26

1998-10-13

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

7351438, G01P 102

Patent

active

058214194

ABSTRACT:
A micromechanical sensor unit for detecting acceleration has pendulums each with a spiral spring and a seismic mass. Supports each being connected to a respective one of the pendulums, and position sensors, each two of the position sensors is associated with a respective one of the pendulums. Each position sensor and an associated pendulum form a switch with a defined triggering threshold and at least two switches respond to the same direction of acceleration. At least one switch is a safing sensor with a separate tap of a sensor signal.

REFERENCES:
patent: 3889232 (1975-06-01), Bell
patent: 4855544 (1989-08-01), Glenn
patent: 4873868 (1989-10-01), Pierre et al.
patent: 4882933 (1989-11-01), Petersen
patent: 4991682 (1991-02-01), Kuntz
patent: 5103667 (1992-04-01), Allen et al.
patent: 5134306 (1992-07-01), Schumacher
patent: 5192395 (1993-03-01), Boysel
patent: 5233141 (1993-08-01), Breed
patent: 5591910 (1997-01-01), Lin
"Fabrication of Capacitive Acceleration Sensors by the LIGA Technique", (Burbaum et al.), Nuclear Research Center Karlsruhe, No. 21-01, pp. 559-563. 1991 (no month).

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