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Microelectromechanical gyroscope with open loop reading...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microelectromechanical gyroscope with self-test function and...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microelectromechanical gyroscope with suppression of...

Measuring and testing – Speed – velocity – or acceleration – With rotary gyroscope
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Microelectromechanical lateral accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Microelectromechanical lateral accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Microelectromechanical sensor with improved mechanical...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microelectromechanical structure insensitive to mechanical...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Microelectromechanical system for measuring angular rate

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microelectronic integrated sensor and method for producing the s

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Microfabricated linear accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Microfabricated tuning fork gyroscope and associated...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyro tuning using focused ion beams

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyrometer

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope having asymmetric comb sensors

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope having inner and outer mass parts

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope tunable for translational acceleration

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope with closed loop output

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope with integrated vibratory element

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope with integrated vibratory element

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Microgyroscope with two resonant plates

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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