Tuning fork gyroscope

Details Tuning fork gyroscope Tuning fork gyroscope

2005-03-08

2005-03-08

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504020, C073S504160

Reexamination Certificate

active

06862934

ABSTRACT:
A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for sensing changes in the nominal gaps between the sense plate and the proof mass and for outputting a signal indicative of the gyroscope angular rate.

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Ward et al. (US 2004/0035206 A1), Microelectromechaninal sensors having reduced signal bias errors and methods of manufacturing the same.*
N. Ito et al., “A Rapid and Selective Anodic Bonding Method”, Jun. 1995, Transducers ′95—Eurosensors IX, pp. 277-280.
U.S. Appl. No. 10/004,145, filed Oct. 4, 2002, Sawyer.

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