Torsional nonresonant z-axis micromachined gyroscope with...

Details Torsional nonresonant z-axis micromachined gyroscope with... Torsional nonresonant z-axis micromachined gyroscope with...

2005-08-12

2008-09-09

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

07421898

ABSTRACT:
A gimbal-type torsional z-axis micromachined gyroscope with a non-resonant actuation scheme measures angular rate of an object with respect to the axis normal to the substrate plane (the z-axis). A 2 degrees-of-freedom (2-DOF) drive-mode oscillator is comprised of a sensing plate suspended inside two gimbals. By utilizing dynamic amplification of torsional oscillations in the drive-mode instead of resonance, large oscillation amplitudes of the sensing element is achieved with small actuation amplitudes, providing improved linearity and stability despite parallel-plate actuation. The device operates at resonance in the sense direction for improved sensitivity, while the drive direction amplitude is inherently constant within the same frequency band.

REFERENCES:
patent: 5515724 (1996-05-01), Greiff et al.
patent: 6845669 (2005-01-01), Acar et al.
patent: WO 02/088631 (2002-11-01), None

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