Sensor for determining angular velocity
Sensor having a resonance structure, especially an...
Sensor having an off-frequency drive scheme and a sense bias gen
Signal processing system for inertial sensor
Signal processing system for inertial sensor
Silicon base plate with low parasitic electrical...
Silicon bulk micromachined, symmetric, degenerate vibratorygyros
Silicon dual inertial sensors
Silicon gyro with integrated driving and sensing structures
Silicon gyroscope and method of driving the same
Silicon integrated angular rate sensor
Silicon micromachined motion sensor and method of making
Silicon micromechanical gyroscope
Single axis attitude sensor
Single axis rate sensor noise reduction
Single ended tuning fork inertial sensor and method
Single ended tuning fork internal sensor and method
Single transducer levitator
Six degree-of-freedom micro-machined multi-sensor
Six-legged type piezoelectric vibration gyroscope