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Angular motion sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Angular rate sensor and method of manufacturing the same

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Angular speed measuring device

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Angular velocity sensor device

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Annual shear element with radial preload

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Apparatus and method for anchoring micromachined structures

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Apparatus and method for measuring movement

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus and method for multi-axis capacitive sensing

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus and method for multi-axis capacitive sensing

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus for and method of sensing a measured input

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Apparatus for detecting physical quantity

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Apparatus for measuring angular speed

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus for measuring mechanical forces and force actions

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus to minimize stiction in micromachined structures

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus with mechanical and electric springs and method for it

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Apparatus with selected fill gas

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Arrangement for measuring rotational velocity

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Arrangement for the determination of the cage rotational speed a

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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