Angular motion sensor
Angular rate sensor and method of manufacturing the same
Angular speed measuring device
Angular velocity sensor
Angular velocity sensor
Angular velocity sensor device
Annual shear element with radial preload
Apparatus and method for anchoring micromachined structures
Apparatus and method for measuring movement
Apparatus and method for multi-axis capacitive sensing
Apparatus and method for multi-axis capacitive sensing
Apparatus for and method of sensing a measured input
Apparatus for detecting physical quantity
Apparatus for measuring angular speed
Apparatus for measuring mechanical forces and force actions
Apparatus to minimize stiction in micromachined structures
Apparatus with mechanical and electric springs and method for it
Apparatus with selected fill gas
Arrangement for measuring rotational velocity
Arrangement for the determination of the cage rotational speed a