Angular rate sensor and method of manufacturing the same

Details Angular rate sensor and method of manufacturing the same Angular rate sensor and method of manufacturing the same

2006-05-30

2009-06-02

Jackson, Jr., Jerome (Department: 2815)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C257S415000, C257S416000, C257S417000, C257S418000, C257S419000

Reexamination Certificate

active

07540191

ABSTRACT:
An angular rate sensor100comprises a first structure110which includes a fixed portion111having an opening114,a displacing portion112placed in the opening114,and a connecting portion113adapted to connect the fixed portion111and the displacing portions112;a second structure130which includes a weighting portion132joined to the displacing portion112,and a pedestal portion131arranged to surround the weighting portions132and joined to the fixed portion111,and is laminated in place on the first structure110.A first body140formed by laminating a first metal layer142and a first insulating layer141thereon is joined to the fixed portion111such that the first insulating layer141faces the fixed portion111.A second substrate150formed by laminating a second metal layer152and a second insulating layer151thereon is joined to the pedestal portion131such that the second insulating layer151faces the pedestal portion131.

REFERENCES:
patent: 5233213 (1993-08-01), Marek
patent: 6400009 (2002-06-01), Bishop et al.
patent: 2005/0253283 (2005-11-01), DCamp et al.
patent: A-2002-350138 (2002-12-01), None

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