Apparatus to minimize stiction in micromachined structures

Details Apparatus to minimize stiction in micromachined structures Apparatus to minimize stiction in micromachined structures

1994-12-01

1996-08-06

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73DIG1, 3612832, G01P 1508

Patent

active

055422950

ABSTRACT:
An electro-mechanical micromachined structure uses bumpers to prevent contact between structures at different potentials. A beam is connected to one or more anchors by flexible suspensions, which permit the beam to move along a predetermined axis relative to one or more plates. The suspension includes at least one bumper positioned so that the bumper will contact another part of the suspension before the beam contacts the plates. The bumper is made from the same material as the suspension, during the same processing step. The bumper is positioned to take advantage of shrinkage or expansion of the beam during processing which forces the bumper closer to its contact point then would otherwise be possible.

REFERENCES:
patent: 5314572 (1994-05-01), Core et al.
patent: 5337606 (1994-08-01), Bennett et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5392650 (1995-02-01), O'Brien et al.
patent: 5447068 (1995-09-01), Tang

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