Apparatus and method for anchoring micromachined structures

Details Apparatus and method for anchoring micromachined structures Apparatus and method for anchoring micromachined structures

2006-11-14

2006-11-14

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504120, C361S280000

Reexamination Certificate

active

07134340

ABSTRACT:
Micromachined structures, such as fixed drive or sensing fingers of an inertial sensor, are anchored to a substrate using multiple anchors or elongated anchors in order to reduce the bending or twisting of the micromachined structure about the anchor point.

REFERENCES:
patent: 5487305 (1996-01-01), Ristic et al.
patent: 5574222 (1996-11-01), Offenberg
patent: 5587518 (1996-12-01), Stevenson et al.
patent: 5734105 (1998-03-01), Mizukoshi
patent: 5780740 (1998-07-01), Lee et al.
patent: 6070464 (2000-06-01), Koury et al.
patent: 6370954 (2002-04-01), Zerbinie et al.
patent: 6513380 (2003-02-01), Reeds, III et al.
patent: 1 083 144 (2001-03-01), None
patent: 1 083 430 (2001-03-01), None
Spangler et al.,ISAAC—Integrated Silicon, Automotive, Accelerometer,Transducers '95, Eurosensors IX, 4 pages. (Jun. 1995).

Affiliated with

Also associated with

Rating

Apparatus and method for anchoring micromachined structures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for anchoring micromachined structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for anchoring micromachined structures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3667909