Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Patent
1999-06-22
2000-08-01
Ferensic, Denise L.
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
432241, 432253, 432258, 414938, 211 4118, F27D 500
Patent
active
060958065
ABSTRACT:
A boat for semiconductor wafers includes first, second and third support rods arranged between and connected to top and bottom plates. The first, second and third support rods include a plurality of first racks, a plurality of second racks, and a plurality of third racks, respectively, such that the racks of each rods are vertically arrayed with gaps therebetween. The first, second and third racks serving to define a plurality of horizontal wafer supporting levels. Each wafer supporting level is defined by only combination of the first, second and third racks of the corresponding height. In each wafer supporting level, the first and second racks are arranged substantially in symmetry with respect to an axis passing through the center of a wafer transfer port, and the third rack is arranged deviant from the axis by a certain distance corresponding to 5% to 48% of the diameter of the wafer.
REFERENCES:
patent: 4802842 (1989-02-01), Hirayama
patent: 4872554 (1989-10-01), Quernemoen
patent: 5054418 (1991-10-01), Thompson et al.
patent: 5055036 (1991-10-01), Asano et al.
patent: 5310339 (1994-05-01), Ushikawa
patent: 5316472 (1994-05-01), Niino et al.
patent: 5445486 (1995-08-01), Kitayama et al.
patent: 5458688 (1995-10-01), Watanabe
patent: 5586880 (1996-12-01), Ohsawa
patent: 5915957 (1999-06-01), Tanigawa
Kitamiya Hisashi
Kitayama Hirofumi
Suzuki Shizuo
Ferensic Denise L.
Kabushiki Kaisha Toshiba
Tokyo Electron Limited
Wilson Gregory A.
LandOfFree
Semiconductor wafer boat and vertical heat treating system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor wafer boat and vertical heat treating system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer boat and vertical heat treating system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-658012