4. Etching a substrate: processes
  5. Etching and coating occur in the same processing chamber
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Electron beam etching device and method

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Etch with uniformity control

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Etching method and apparatus

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Etching technique for producing cubic boron nitride films

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Patent

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