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In-situ monitoring of the change in thickness of films

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Patent

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In-situ monitoring of the change in thickness of films

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Patent

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Insulative contact sensor

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Reexamination Certificate

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Integrated sensor device and measuring system using the same

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Reexamination Certificate

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Ion concentration measuring apparatus

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Patent

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