In-situ monitoring of the change in thickness of films

Details In-situ monitoring of the change in thickness of films In-situ monitoring of the change in thickness of films

1996-05-01

1998-03-24

Regan, Maura K.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Semiconductors for nonelectrical property

324230, 324671, G01B 710

Patent

active

057316970

ABSTRACT:
The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.

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