Micro-magnetic latching switch with relaxed permanent magnet...
Micro-magnetic latching switch with relaxed permanent magnet...
Micro-relay
Micro-relay and method of fabricating the same
Micro-switching device actuated by low voltage
Micro-switching device and manufacturing method for the same
Micro-switching element fabrication method and...
Microactuator, optical apparatus, and optical switch
Microelectromechanical device having an active opening switch
Microelectromechanical isolating circuit
Microelectromechanical liquid metal current carrying system,...
Microelectromechanical liquid metal current carrying system,...
Microelectromechanical magnetic switches having rotors that...
Microelectromechanical micro-relay with liquid metal contacts
Microelectromechanical micro-relay with liquid metal contacts
Microelectromechanical power generator and vibration sensor
Microelectromechanical RF switch
Microelectromechanical RF switch
Microelectromechanical system able to switch between two...
Micromachined bi-material signal switch