Microelectromechanical device having an active opening switch

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – With motor

Reexamination Certificate

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C200S181000

Reexamination Certificate

active

07053736

ABSTRACT:
A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another microelectromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.

REFERENCES:
patent: 6069540 (2000-05-01), Berenz et al.
patent: 6452124 (2002-09-01), York et al.
patent: 6720851 (2004-04-01), Hallbjorner et al.
patent: 2003/0116417 (2003-06-01), DeReus
patent: 2004/0050674 (2004-03-01), Rubel
patent: 0 986 082 (2000-03-01), None
Plötz et al., “A low-voltage torsional actuator for application in RF-microswitches,” Sensors and Actuators, vol. A 92, 2001, pp. 312-317.
Hah et al., “A Low Voltage Actuated Micromachined Microwave Switch Using Torsion Springs and Leverage,” 2000 IEEE MTT-S Digest, pp. 157-160.
International Search Report, PCT/US03/31239, mailed Oct. 12, 2004.

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