Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Radio frequency switch
Patent
1994-07-07
1995-11-14
Donovan, Lincoln
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Radio frequency switch
333104, 333232, 200512, H01H 5300
Patent
active
054670683
ABSTRACT:
A micromachined signal switch for vertical displacement includes a fixed substrate having at least one signal line and includes an actuator substrate that is thermally actuated to selectively connect a second signal line to the first signal line. The actuator substrate includes a plurality of legs constructed of materials having sufficiently different coefficients of thermal expansion to create stresses that arc the legs when the legs are subjected to elevated temperatures. In the preferred embodiment, a first material for forming the legs is silicon and a second material is a metal, such as electroplated nickel. A displaceable contact region may be formed integrally with the actuator substrate, but the contact region is preferably a region of an interposer substrate between the fixed substrate and the actuator substrate. The displaceable contact region has a raised position in which the signal line on the fixed substrate is "off" and has a lowered position in which a conductive member on the contact region is positioned to provide electrical communication to the signal line.
REFERENCES:
patent: 5047740 (1991-09-01), Alman
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5121089 (1992-06-01), Larson
patent: 5164688 (1992-11-01), Larson
patent: 5168249 (1992-12-01), Larson
patent: 5175521 (1992-12-01), Larson
patent: 5374792 (1994-12-01), Ghezzo et al.
Field Leslie A.
Ruby Richard C.
Donovan Lincoln
Hewlett--Packard Company
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