Microactuator, optical apparatus, and optical switch

Details Microactuator, optical apparatus, and optical switch Microactuator, optical apparatus, and optical switch

2011-03-22

2011-03-22

Mai, Anh T (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000, C385S015000

Reexamination Certificate

active

07911299

ABSTRACT:
A microactuator has a fixed portion and a movable portion that is provided in such a way as to be movable relative to the fixed portion between a first position at which it is in contact with a predetermined portion of the fixed portion and a second position away from the first position. The fixed portion has a first electrode portion, the movable portion has a second electrode portion that can produce an electrostatic force between it and the first electrode portion by a voltage between it and the first electrode portion, and the first and second electrode portions are arranged in such a way that a first force that biases the movable portion in a direction toward the first position according to the electrostatic force created when the voltage is constant reaches a peak when the movable portion is at a third position between the first position and the second position.

REFERENCES:
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patent: 6198656 (2001-03-01), Zhang
patent: 6490073 (2002-12-01), Yoon
patent: 6758983 (2004-07-01), Conant et al.
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patent: 2005/0213878 (2005-09-01), Akagawa et al.
patent: 11-52278 (1999-02-01), None
patent: 2001-042233 (2001-02-01), None
patent: 2004-130466 (2004-04-01), None
patent: WO 03/060592 (2003-07-01), None

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