Film bulk acoustic wave resonator
Film bulk acoustic wave resonator, film bulk acoustic wave...
Film bulk acoustic wave resonator, its fabrication method...
Film speaker using a piezo-electric element
Film tensioning apparatus
Film-bulk acoustic wave resonator with motion plate and method
Film-bulk acoustic wave resonator with motion plate and method
Filter having multiple piezoelectric thin-film resonators
Filter with surface acoustic wave resonators
Fine control of electromechanical motors
Fine positioning system using an inertial motor based on a...
Fine walking actuator
Fixed origin biplane ultrasonic transducer
Flange unit for the active suppression of vibrations
Flat actuator or sensor with internal prestress
Flat motors
Flat packaged piezoelectric device using a glass-ceramic composi
Flat resonating electromechanical drive unit
Flat scanning stage for scanned probe microscopy
Flat seal