Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-11-21
2008-08-05
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S324000
Reexamination Certificate
active
07408287
ABSTRACT:
The present invention provides a film bulk acoustic wave resonator (FBAR) filter that can keep the Q factor high. The FBAR filter comprises a first FBAR with a first resonant frequency and a second FBAR with a second resonant frequency, formed on a same substrate. The FBAR filter has such a structure that a first underlayer is formed between the substrate and a first bottom electrode layer and a second underlayer is formed between the substrate and a second bottom electrode layer, the first underlayer thickness being different from the second underlayer thickness.
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Ruby et al., “Micromachined Thin Film Bulk Acoustic Resonators,” 1994 IEEE International Frequency Control Symposium, pp. 135-138.
Nishihara et al., “High Performance and Miniature Thin Film Bulk Acoustic Wave Filters for 5 GHz,” 2002 IEEE Ultrasonic Symposium, pp. 969-972.
Asai Kengo
Hikita Mitsutaka
Isobe Atsushi
Matsumoto Hisanori
Hitachi Media Electronics Co. Ltd.
Miles & Stockbridge P.C.
Rosenau Derek J
Schuberg Darren
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