Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-07-26
2011-07-26
Budd, Mark (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S320000
Reexamination Certificate
active
07986075
ABSTRACT:
The film bulk acoustic wave resonator includes a laminate structure composed of a piezoelectric layer, and first and second electrode layers interposing at least part of the piezoelectric layer, in which the first metal electrode is dispersively formed on an electrode plane facing the second metal electrode, and a gap is formed in a substrate correspondingly to the laminate-structured resonance part. Except for an area of a wire electrode electrically connected to the first electrode layer and an area of a wire electrode electrically connected to the second electrode layer, the piezoelectric layer, first electrode layer and second electrode layer do not come in contact with the insulating substrate but are supported on a hollow. Also, a prop is formed in the gap to support the laminate structure.
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R. Ruby et al., “Micromachines Thin Film Bulk Acoustic Resonators”, 1994 IEEE International Frequency Control Symposium, pp. 135-138.
Asai Kengo
Isobe Atsushi
Matsumoto Hisanori
A. Marquez, Esq. Juan Carlos
Budd Mark
Hitachi Media Electronics Co. Ltd.
Stites & Harbison PLLC
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