Filter having multiple piezoelectric thin-film resonators

Details Filter having multiple piezoelectric thin-film resonators Filter having multiple piezoelectric thin-film resonators

2007-05-30

2009-06-09

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S371000, C333S187000, C333S189000

Reexamination Certificate

active

07545077

ABSTRACT:
A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.

REFERENCES:
patent: 6215375 (2001-04-01), Larson, III et al.
patent: 6222304 (2001-04-01), Bernstein
patent: 6734763 (2004-05-01), Nishihara et al.
patent: 7170357 (2007-01-01), Driscoll et al.
patent: 2004/0245892 (2004-12-01), Yamada et al.
patent: 2005/0264137 (2005-12-01), Taniguchi et al.
patent: 60-189307 (1985-09-01), None
patent: 2004-200843 (2004-07-01), None

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