Solid state commutated linear motor with an ironless multiphase
Specially oriented material and magnetization of permanent magne
Spiral linear motor
Split coil linear motor for z force
Stage apparatus
Stage apparatus
Stage apparatus and inspection apparatus having stage apparatus
Stage apparatus and linear motor, and exposure apparatus and dev
Stage apparatus and method of controlling the same
Stage apparatus and method of using the same
Stage apparatus, exposure apparatus, and device...
Stage construction incorporating magnetically levitated...
Stage device and exposure apparatus
Stage device capable of moving an object to be positioned...
Stage device, and exposure apparatus with linear motor...
Stage having paired E/I core actuator control
Stage system with onboard linear motor
Staggered motor core
Stator fastening structure of reciprocating motor
Stator for reciprocating motor and fabrication method thereof