Stage apparatus

Details Stage apparatus Stage apparatus

2007-05-25

2009-12-22

Leung, Quyen (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S012060, C310S015000, C033S358000, C033S361000

Reexamination Certificate

active

07635930

ABSTRACT:
At least one exemplary embodiment is directed to a stage apparatus which includes a stage movable in a first direction, a linear motor configured to drive the stage in the first direction, a magnet unit having first magnets disposed on the stage and second magnets disposed at both ends of a stroke of the stage such that the same poles of the first and second magnets face each other, and a supporting member supporting the second magnets. The supporting member is supported movably in the first direction.

REFERENCES:
patent: 5841250 (1998-11-01), Korenage et al.
patent: 6903468 (2005-06-01), Korenaga
patent: 2004/0095563 (2004-05-01), Korenaga
patent: 2004-079639 (2004-03-01), None

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