Stage apparatus and method of controlling the same

Details Stage apparatus and method of controlling the same Stage apparatus and method of controlling the same

2005-09-20

2005-09-20

Le, Dang (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S090500

Reexamination Certificate

active

06946757

ABSTRACT:
A stage apparatus includes a first-direction guide which extends in a first direction and can move in a second direction perpendicular to the first direction, a first driving mechanism which moves the first-direction guide in the second direction, a movable body which can be guided by the first-direction guide to move in the first direction, and a first electromagnetic force generating device which generates an electromagnetic force in the second direction between the movable body and the first-direction guide in synchronism with acceleration of the first-direction guide in the second direction, so as to keep the movable body and the first-direction guide in noncontact with each other.

REFERENCES:
patent: 4013906 (1977-03-01), Eastham
patent: 4667139 (1987-05-01), Hirai et al.
patent: 5264982 (1993-11-01), Cox et al.
patent: 5467720 (1995-11-01), Korenaga et al.
patent: 5518550 (1996-05-01), Korenaga et al.
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5780943 (1998-07-01), Ono
patent: 5841250 (1998-11-01), Korenage et al.
patent: 6002465 (1999-12-01), Korenaga
patent: 6037680 (2000-03-01), Korenaga et al.
patent: 6107703 (2000-08-01), Korenaga
patent: 6128069 (2000-10-01), Korenaga
patent: 6157159 (2000-12-01), Korenaga et al.
patent: 6177978 (2001-01-01), Korenaga
patent: 6255795 (2001-07-01), Ebihara et al.
patent: 6265793 (2001-07-01), Korenaga
patent: 6271606 (2001-08-01), Hazelton
patent: 6320645 (2001-11-01), Inoue et al.
patent: 6353271 (2002-03-01), Williams
patent: 6359677 (2002-03-01), Itoh et al.
patent: 6414742 (2002-07-01), Korenaga et al.
patent: 6479991 (2002-11-01), Korenaga
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 2002/0145721 (2002-10-01), Korenaga et al.
patent: 2003/0007140 (2003-01-01), Korenaga
patent: 2003/0098966 (2003-05-01), Korenaga et al.
patent: 2003/0102723 (2003-06-01), Korenaga
patent: 2000-106344 (2000-04-01), None

Affiliated with

Also associated with

Rating

Stage apparatus and method of controlling the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage apparatus and method of controlling the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus and method of controlling the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3378130