Stage having paired E/I core actuator control

Details Stage having paired E/I core actuator control Stage having paired E/I core actuator control

1998-08-27

2000-05-30

Ramirez, Nestor

Electrical generator or motor structure

Dynamoelectric

Linear

H02K 4100

Patent

active

060694173

ABSTRACT:
A fine stage control system for use for instance in a semiconductor lithography machine, uses a pair of opposing (push-pull) E/I core actuators to move the stage with high precision along an axis. The paired actuators are coupled together mathematically in terms of their control characteristics and controlled as a single entity, thereby providing a more efficient control scheme and improved system performance.

REFERENCES:
patent: 4623202 (1986-11-01), Shingu
patent: 4629262 (1986-12-01), Hamilton
patent: 4952858 (1990-08-01), Galburt
patent: 5013987 (1991-05-01), Wakui
patent: 5115192 (1992-05-01), Bardas et al.
patent: 5196745 (1993-03-01), Trumper
patent: 5227948 (1993-07-01), Boon et al.
patent: 5294854 (1994-03-01), Trumper
patent: 5467244 (1995-11-01), Jayawant et al.

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