Positioning apparatus and charged-particle-beam exposure...
Positioning apparatus and exposure apparatus using the same
Positioning apparatus for a positioning head
Positioning apparatus, drive unit and exposure apparatus...
Positioning apparatus, exposure apparatus using thereof and...
Positioning apparatus, information recording/reproducing...
Positioning device
Positioning device for planar positioning
Positioning device having three coil systems mutually enclosing
Prefabricated stator windings
Pressurized air-gap guided active linear motor suspension system
Primary coil assembly for a superconducting linear induction mot
Primary part and linear electrical machine with force ripple...
Primary part and linear electrical machine with force ripple...
Primary part having a cover for a linear motor
Printed circuit linear motor
Probe position actuator with an elongated stroke
Probe positioning actuator
Process for forming an annular stack of metallic laminations...
Projectile launch package for arc driven electromagnetic launche