Positioning apparatus, exposure apparatus using thereof and...

Details Positioning apparatus, exposure apparatus using thereof and... Positioning apparatus, exposure apparatus using thereof and...

2008-05-27

2008-05-27

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S015000

Reexamination Certificate

active

07378764

ABSTRACT:
A positioning apparatus including a movable member having a plurality of magnets, and a plurality of coils arranged in X- and Y-axial directions, for displacing the movable member in the X- and Y-axial directions, and in a rotational direction around the Z-axis.

REFERENCES:
patent: 6208045 (2001-03-01), Hazelton et al.
patent: 7075197 (2006-07-01), Korenaga
patent: 2003/0052548 (2003-03-01), Hol et al.
patent: 2004/0126907 (2004-07-01), Korenaga
patent: 2005/0140215 (2005-06-01), Korenaga
patent: 2005/0194843 (2005-09-01), Korenaga
patent: 2004-254489 (2004-09-01), None

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