Positioning apparatus and charged-particle-beam exposure...

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Reexamination Certificate

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10693104

ABSTRACT:
A positioning apparatus includes a movable member for transmitting a driving force in a driving-axis direction to a stage, a first electromagnet for driving the movable member in the driving-axis direction by forming a magnetic path between the movable member and the first electromagnet and generating first magnetic flux, and a second electromagnet, which is positioned away from the first electromagnet and arranged in an overlapping direction, for driving the movable member in the same direction as the driving-axis direction of the first electromagnet by forming a magnetic path between the movable member and the second electromagnet and generating second magnetic flux having an inverted plurality from the first magnetic flux.

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patent: 5294854 (1994-03-01), Trumper
patent: 6069417 (2000-05-01), Yuan et al.
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patent: 6548920 (2003-04-01), Joong et al.
patent: 6720681 (2004-04-01), Hsiao
patent: 6787945 (2004-09-01), Miyata
patent: 2002/0117903 (2002-08-01), Uchida
patent: 11-194824 (1999-07-01), None

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