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Determining process condition in substrate processing module

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
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Determining profile parameters of a structure formed on a...

Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
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Determining profile parameters of a structure using...

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
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Determining real-time performance of a sub-assembly driven...

Data processing: measuring – calibrating – or testing – Measurement system – Remote supervisory monitoring
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Determining the complexity of a computing environment

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Determining the depth of reinforcing bars in a concrete...

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
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Determining the failure rate of an integrated circuit

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Determining the minimum operation and shutdown time

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
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Determining three dimensional velocity of a object

Data processing: measuring – calibrating – or testing – Measurement system – Speed
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Deterministic component identifying apparatus, identifying,...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Deterministic component model judging apparatus, judging...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
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Deterministic power-estimation for thermal control

Data processing: measuring – calibrating – or testing – Measurement system – Temperature measuring system
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Device and a method for producing information about the...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
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Device and a method for producing information about the...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
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Device and method for ascertaining the wheel position of...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
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Device and method for controlling the state of an energy...

Data processing: measuring – calibrating – or testing – Measurement system – Time duration or rate
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Device and method for controlling the state of an energy...

Data processing: measuring – calibrating – or testing – Measurement system – Time duration or rate
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Device and method for detecting an angular position of a...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
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Device and method for detecting an angular position of a...

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
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Device and method for determining a spatial position of an...

Data processing: measuring – calibrating – or testing – Measurement system – Temperature measuring system
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