Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2008-04-21
2011-10-25
Wachsman, Hal (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S182000, C702S084000
Reexamination Certificate
active
08046193
ABSTRACT:
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for a more simplified configuration.
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Parker Jeffrey M.
Pieper John B.
Renken Wayne G.
Yetter, Jr. Forrest Gilbert
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
Wachsman Hal
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