4. Data processing: measuring, calibrating, or testing
  5. Calibration or correction system
  6. Length, distance, or thickness
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Method and apparatus for accurately determining height...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
Reexamination Certificate

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Method and apparatus for automatic calibration of critical...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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Method and apparatus for measuring the thickness of non-circular

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
Patent

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Method and system for enhancing the accuracy of measurements...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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Method and system for enhancing the accuracy of measurements...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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Method for assessing the measuring accuracy of a sensor...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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Method for correcting thin-film formation program of semiconduct

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
Patent

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Method for edge bias correction of topography-induced...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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Method for filtering laser range data

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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