4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Plural coatings applied by vapor, gas, or smoke
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ALD reactor and method with controlled wall temperature

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate

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Apparatus for vapor deposition

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Patent

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Atomic layer deposition apparatus

Coating processes – Coating by vapor – gas – or smoke – Plural coatings applied by vapor – gas – or smoke
Reexamination Certificate

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