Semiconductor processing equipment having improved process...

Shaping a plasma with a magnetic field to control etch rate...

Single-tube interlaced inductively coupling plasma source

Stacked RF excitation coil for inductive plasma processor

System for the plasma treatment of large area substrates

Systems and methods for enhancing plasma processing of a...

Thermal management of inductively coupled plasma reactors

Thin film electrostatic shield for inductive plasma processing

Uniform gas distribution in large area plasma source

Upper chamber for high density plasma CVD

Upper chamber for high density plasma CVD

Vacuum plasma processor apparatus and method

Vacuum plasma processor having a chamber with electrodes and...

Variable efficiency faraday shield