Magnetic confinement in a plasma reactor having an RF bias...
Magnetically enhanced inductively coupled plasma reactor...
Magnetically enhanced inductively coupled plasma reactor...
Magnetically enhanced, inductively coupled plasma source for...
Method and apparatus for generating high-density uniform plasma
Method and apparatus for plasma forming inner magnetic...
Method and apparatus for plasma processing
Method and apparatus for plasma processing
Method and apparatus for plasma processing
Method of correcting baseline skew by a novel motorized...
Modified transfer function deposition baffles and high...