4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Housing or package
  6. With desiccant, getter, or gas filling
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Methods and apparatus for attaching getters to MEMS device...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Reexamination Certificate

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Micro-mechanical device with non-evaporable getter

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Patent

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Microelectronic mechanical system and methods

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Reexamination Certificate

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Micromechanical device which has cavities having different...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Reexamination Certificate

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