Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With desiccant – getter – or gas filling
Reexamination Certificate
2005-07-05
2005-07-05
Potter, Roy (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
With desiccant, getter, or gas filling
C257S704000
Reexamination Certificate
active
06914323
ABSTRACT:
A method for reducing occurrences of loose gettering material particles within micro-electromechanical system (MEMS) devices is described. The MEMS devices include a micro-machine within a substantially sealed cavity formed by a housing and a cover for the housing. The cavity containing a getter mounted on a getter substrate which is to be attached to the cover. The method includes providing an area between a portion of the cover and a portion of the getter substrate, positioning the getter within the area, and attaching the getter substrate to the cover.
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International Search Report dated Sep. 1, 2004, Application No. PCT/US2004/008024, 8 pages.
Curtis Harlan L.
DCamp Jon B.
Dunaway Lori A.
Glenn Max C.
Armstrong Teasdale LLP
Honeywell International , Inc.
Luxton, Esq. Matthew
Potter Roy
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