Micro-mechanical device with non-evaporable getter

Details Micro-mechanical device with non-evaporable getter Micro-mechanical device with non-evaporable getter

1995-03-08

1997-03-11

Brown, Peter Toby

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

With desiccant, getter, or gas filling

257729, 359896, H01L 2318

Patent

active

056104383

ABSTRACT:
The present invention relates to micro-mechanical devices including actuators, motors and sensors with improved operating characteristics. A micro-mechanical device (10) comprising a DMD-type spatial light modulator with a getter (100) located within the package (52). The getter (100) is preferably specific to water, larger organic molecules, various gases, or other high surface energy substances. The getter is a non-evaporable getter (NEG) to permit the use of active metal getter systems without their evaporation on package surfaces.

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